Software Ecosystem
Overview
- CMIt delivers a comprehensive semiconductor software ecosystem that seamlessly integrates inspection, metrology, AI modules, EFEM automation, and data analysis. This cross-platform, end-to-end solution empowers customers to enhance productivity, improve yield, and accelerate decision-making.
- CMIt software ecosystem is designed as a modular yet fully integrated platform. Each component—from inspection engines and AI classification to advanced analytics—is interoperable, ensuring scalability and flexibility for evolving semiconductor manufacturing needs.
- By bridging inspection and metrology data with powerful AI and analytics modules, the ecosystem transforms raw manufacturing data into actionable insights. This enables faster root-cause identification, streamlined workflows, and continuous yield improvement.
- Built with both interoperability and automation in mind, the ecosystem reduces manual intervention, standardizes data formats, and creates a unified environment for cross-tool and cross-fab analysis, supporting true digital transformation in semiconductor manufacturing.
Inspection & Metrology Module (MOON® System)
- MOON® – Core Inspection & Metrology Software
MOON® provides high-precision inspection and metrology algorithms, supporting 2D/3D inspection、metrology and a wide range of advanced packaging applications
AI Module (ACME® System)
- ACME® – All-in-One AI Model Development Platform
- RADON – Inspection & Classification AI
- NEON – Analysis AI
AI modules enable both real-time and offline defect classification and model optimization, reducing manual review while improving inspection efficiency and accuracy.
Analysis Module(LUNA® System)
- MERCURY – Defect Review Software
- VENUS – Defect Analysis Software
- MARS – 3D Metrology Data Analysis Software
LUNA® Analysis Module is designed for report re-verification, cross-source data comparison, advanced semiconductor analytics, and 3D metrology data evaluation. By integrating IQM, defect distribution, and comprehensive bump/warp analysis, it enables precise insights that drive process optimization and yield improvement.
EFEM Module (NOVA® System)
- STELLAR – EFEM Bridge Middleware Integration Software
- LUMIN – Automation Module
These modules ensure stable wafer handling and front-end automation operations, seamlessly bridging inspection systems with manufacturing workflows.
Tool Matching
- Recipe Upload/Download – Supports recipe transfer between tools for seamless deployment.
- Recipe Server – Centralized storage and management of recipes over a high-speed network, ensuring fast access and reliable version control.
The system enables cross-tool parameter management and synchronization, including parameter upload, download, and version control, to ensure inspection result consistency across tool, streamline parameter deployment, and facilitate continuous yield optimization.
