EBR （Edge Bead Removal Inspection）

EBR Inspection​

• Fast defect detection
• ​ Black and white photos: 300 Photos/Sec
•  Color photos: 3~5 Photos/Sec. (Depends on distance)​
• ​ Shot: 360˚clear defect images are provided

Wafer Edge Inspection

​​EBR Inspection of Wafers​

• EBR defects
• Shot Map
  
• ​ Notch area algorithm

EBR Inspection

 Inspection (Notch Area) ​

• ​The software algorithm has a built-in function to automatically determine the notch position, which only captures defects outside the notch for defect data output and judgment.

Inspection (Notch Area)   

Metrology

• Precise edge computing capability
• ​Removed Photoresist Width Measurement
• Different angle lenses can be switched

Precise Edge Detection and Calculation