Application
2D / 3D Metrology
2D / 3D Sampling Metrology
2D Metrology
- RDL CD/ pad CD/ bump diameter
- CD value: 1.2μm~300μm
3D Metrology
- Height: 5μm~250μm
- High AR(1:7) tall pillar height is workable
3D Metrology
Full BH/COP Measurement
- Confocal White Light Line Scan
Thin Film THK Measurement
- Interferometric Principle
